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Gate stack thermal stability and PBTI reliability challenges for 3D sequential integration: demonstration of a suitable gate stack for top and bottom tier nMOS

dc.contributor.authorFranco, Jacopo
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorVandooren, Anne
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorSioncke, Sonja
dc.contributor.authorPutcha, Vamsi
dc.contributor.authorVais, Abhitosh
dc.contributor.authorXie, Qi
dc.contributor.authorGivens, Michael
dc.contributor.authorTang, Fu
dc.contributor.authorJiang, X.
dc.contributor.authorSubirats, Alexandre
dc.contributor.authorVaisman Chasin, Adrian
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorKaczer, Ben
dc.contributor.authorLinten, Dimitri
dc.contributor.authorCollaert, Nadine
dc.date.accessioned2021-10-24T04:48:57Z
dc.date.available2021-10-24T04:48:57Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28350
dc.sourceIIOimport
dc.titleGate stack thermal stability and PBTI reliability challenges for 3D sequential integration: demonstration of a suitable gate stack for top and bottom tier nMOS
dc.typeProceedings paper
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorVandooren, Anne
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorPutcha, Vamsi
dc.contributor.imecauthorVais, Abhitosh
dc.contributor.imecauthorXie, Qi
dc.contributor.imecauthorGivens, Michael
dc.contributor.imecauthorVaisman Chasin, Adrian
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorLinten, Dimitri
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecVandooren, Anne::0000-0002-2412-0176
dc.contributor.orcidimecPutcha, Vamsi::0000-0003-1907-5486
dc.contributor.orcidimecVais, Abhitosh::0000-0002-0317-7720
dc.contributor.orcidimecVaisman Chasin, Adrian::0000-0002-9940-0260
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecLinten, Dimitri::0000-0001-8434-1838
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2B-3.1
dc.source.endpage2B3.5
dc.source.conferenceIEEE International Reliability Physics Symposium - IRPS
dc.source.conferencedate2/04/2017
dc.source.conferencelocationMonterey, CA USA
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7936259
imec.availabilityPublished - open access


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