Authors

Gao, Weimin; Blanco, Victor; Philipsen, Vicky; Kamohara, Itaru; Saad, Yves; Ciofi, Ivan; Melvin, Lawrence; Hendrickx, Eric; Wiaux, Vincent; Kim, Ryan Ryoung han

DOI

10.1117/12.2259964

Conference

Extreme Ultraviolet (EUV) Lithograpgy VIII

Title

Modeling EUVL patterning variability for metal layers in 5nm technology node and its effect on electrical resistance

Publication type

Proceedings paper