Publication:

Modeling EUVL patterning variability for metal layers in 5nm technology node and its effect on electrical resistance

Date

2017

Proceedings Paper

https://doi.org/10.1117/12.2259964

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Author(s)

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Philipsen, Vicky

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Kamohara, Itaru

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Melvin, Lawrence

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Hendrickx, Eric

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Kim, Ryan Ryoung han

Metrics

1974 since deposited on 2021-10-24

Acq. date: 2025-12-11