Publication:
Modeling EUVL patterning variability for metal layers in 5nm technology node and its effect on electrical resistance
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1971 since deposited on 2021-10-24
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Acq. date: 2025-10-25
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Views
1971 since deposited on 2021-10-24
415item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations