CMOS process-compatible 200mm polycrystalline AlN substrates for GaN power transistors

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Authors
Geens, Karen; Van Hove, Marleen; Li, Xiangdong; Zhao, Ming; Šatka, Alexander; Vincze, Andrej; Decoutere, Stefaan
Conference
Workshop on Compound Semiconductor Devices and Integrated Circuits - WOCSDICE
Title
CMOS process-compatible 200mm polycrystalline AlN substrates for GaN power transistors
Publication type
Proceedings paper
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