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Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S

dc.contributor.authorGroven, Benjamin
dc.contributor.authorCaymax, Matty
dc.contributor.authorHeyns, Marc
dc.contributor.authorRadu, Iuliana
dc.contributor.authorDelabie, Annelies
dc.date.accessioned2021-10-24T05:13:27Z
dc.date.available2021-10-24T05:13:27Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28423
dc.sourceIIOimport
dc.titleNucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S
dc.typeMeeting abstract
dc.contributor.imecauthorGroven, Benjamin
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecGroven, Benjamin::0000-0002-5781-7594
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.conference2nd Area Selective Deposition Workshop - ASD
dc.source.conferencedate20/04/2017
dc.source.conferencelocationEindhoven The Netherlands
dc.identifier.urlhttp://www.nanomanufacturing.nl/ASD2017/programbook.pdf
imec.availabilityPublished - open access


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