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Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S
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Authors
Groven, Benjamin
;
Caymax, Matty
;
Heyns, Marc
;
Radu, Iuliana
;
Delabie, Annelies
Conference
2nd Area Selective Deposition Workshop - ASD
Title
Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S
Publication type
Meeting abstract
Embargo date
9999-12-31
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