Publication:

Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S

Date

2017
Meeting abstract
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dc.contributor.authorGroven, Benjamin
dc.contributor.authorCaymax, Matty
dc.contributor.authorHeyns, Marc
dc.contributor.authorRadu, Iuliana
dc.contributor.authorDelabie, Annelies
dc.contributor.imecauthorGroven, Benjamin
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorRadu, Iuliana
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecGroven, Benjamin::0000-0002-5781-7594
dc.contributor.orcidimecRadu, Iuliana::0000-0002-7230-7218
dc.date.accessioned2021-10-24T05:13:27Z
dc.date.available2021-10-24T05:13:27Z
dc.date.embargo9999-12-31
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28423
dc.identifier.urlhttp://www.nanomanufacturing.nl/ASD2017/programbook.pdf
dc.source.conference2nd Area Selective Deposition Workshop - ASD
dc.source.conferencedate20/04/2017
dc.source.conferencelocationEindhoven The Netherlands
dc.title

Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S

dc.typeMeeting abstract
dspace.entity.typePublication
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