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Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S
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Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S
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Date
2017
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35657.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Groven, Benjamin
;
Caymax, Matty
;
Heyns, Marc
;
Radu, Iuliana
;
Delabie, Annelies
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1849
since deposited on 2021-10-24
Acq. date: 2025-12-15
Citations
Metrics
Views
1849
since deposited on 2021-10-24
Acq. date: 2025-12-15
Citations