Plasma-enhanced atomic layer seposition of two-dimensional WS2 from WF6, H2 plasma, and H2S

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Authors

Groven, Benjamin; Heyne, Markus; Nalin Mehta, Ankit; Bender, Hugo; Nuytten, Thomas; Meersschaut, Johan; Conard, Thierry; Verdonck, Patrick; Van Elshocht, Sven; Vandervorst, Wilfried; De Gendt, Stefan; Heyns, Marc; Radu, Iuliana; Caymax, Matty; Delabie, Annelies

ISSN

0897-4756

Issue

7

Journal

Chemistry of Materials

Volume

29

Title

Plasma-enhanced atomic layer seposition of two-dimensional WS2 from WF6, H2 plasma, and H2S

Publication type

Journal article

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