Publication:

Plasma-enhanced atomic layer seposition of two-dimensional WS2 from WF6, H2 plasma, and H2S

Date

2017
Journal article
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Author(s)

Groven, Benjamin  
;
Heyne, Markus
;
Nalin Mehta, Ankit  
;
Bender, Hugo  
;
Nuytten, Thomas  
;
Meersschaut, Johan  
;
Conard, Thierry  
;
Verdonck, Patrick  
;
Van Elshocht, Sven  
;
Vandervorst, Wilfried  
;
De Gendt, Stefan  
;
Heyns, Marc  
;
Radu, Iuliana  
;
Caymax, Matty  
;
Delabie, Annelies  

Journal

Chemistry of Materials

Abstract

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