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Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S - Impact on grain size and charge transport
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Authors
Groven, Benjamin
;
Nalin Mehta, Ankit
;
Smets, Quentin
;
Schram, Tom
;
Bender, Hugo
;
Vandervorst, Wilfried
;
Radu, Iuliana
;
Caymax, Matty
;
Heyns, Marc
;
Delabie, Annelies
Conference
AVS 64th International Symposium & Exhibition
Title
Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S - Impact on grain size and charge transport
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Meeting abstract
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