dc.contributor.author | Groven, Benjamin | |
dc.contributor.author | Nalin Mehta, Ankit | |
dc.contributor.author | Smets, Quentin | |
dc.contributor.author | Schram, Tom | |
dc.contributor.author | Bender, Hugo | |
dc.contributor.author | Vandervorst, Wilfried | |
dc.contributor.author | Radu, Iuliana | |
dc.contributor.author | Caymax, Matty | |
dc.contributor.author | Heyns, Marc | |
dc.contributor.author | Delabie, Annelies | |
dc.date.accessioned | 2021-10-24T05:14:17Z | |
dc.date.available | 2021-10-24T05:14:17Z | |
dc.date.issued | 2017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/28425 | |
dc.source | IIOimport | |
dc.title | Nucleation of 2D WS2 by plasma enhanced atomic layer deposition from WF6, H2 plasma and H2S - Impact on grain size and charge transport | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Groven, Benjamin | |
dc.contributor.imecauthor | Nalin Mehta, Ankit | |
dc.contributor.imecauthor | Smets, Quentin | |
dc.contributor.imecauthor | Schram, Tom | |
dc.contributor.imecauthor | Bender, Hugo | |
dc.contributor.imecauthor | Vandervorst, Wilfried | |
dc.contributor.imecauthor | Radu, Iuliana | |
dc.contributor.imecauthor | Caymax, Matty | |
dc.contributor.imecauthor | Heyns, Marc | |
dc.contributor.imecauthor | Delabie, Annelies | |
dc.contributor.orcidimec | Groven, Benjamin::0000-0002-5781-7594 | |
dc.contributor.orcidimec | Nalin Mehta, Ankit::0000-0002-2169-940X | |
dc.contributor.orcidimec | Smets, Quentin::0000-0002-2356-5915 | |
dc.contributor.orcidimec | Schram, Tom::0000-0003-1533-7055 | |
dc.contributor.orcidimec | Radu, Iuliana::0000-0002-7230-7218 | |
dc.source.peerreview | yes | |
dc.source.conference | AVS 64th International Symposium & Exhibition | |
dc.source.conferencedate | 29/10/2017 | |
dc.source.conferencelocation | Tampa Florida, US | |
dc.identifier.url | https://www.avs.org/Symposium | |
imec.availability | Published - imec | |