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Modeling of tone inversion process flow for N5 interconnect to characterize block tip to tip

dc.contributor.authorGuissi, Sofiane
dc.contributor.authorClark, William
dc.contributor.authorJuncker, Aurélie
dc.contributor.authorErvin, J.
dc.contributor.authorGreiner, K.
dc.contributor.authorFried, D.
dc.contributor.authorBriggs, Basoene
dc.contributor.authorDevriendt, Katia
dc.contributor.authorSebaai, Farid
dc.contributor.authorCharley, Anne-Laure
dc.contributor.authorWilson, Chris
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorTokei, Zsolt
dc.date.accessioned2021-10-24T05:16:26Z
dc.date.available2021-10-24T05:16:26Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28431
dc.sourceIIOimport
dc.titleModeling of tone inversion process flow for N5 interconnect to characterize block tip to tip
dc.typeProceedings paper
dc.contributor.imecauthorGuissi, Sofiane
dc.contributor.imecauthorBriggs, Basoene
dc.contributor.imecauthorDevriendt, Katia
dc.contributor.imecauthorSebaai, Farid
dc.contributor.imecauthorCharley, Anne-Laure
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.orcidimecDevriendt, Katia::0000-0002-0662-7926
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage3
dc.source.conferenceIEEE International Interconnect Technology Conference - IITC
dc.source.conferencedate16/05/2017
dc.source.conferencelocationHsinchu Taiwan
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7968952/
imec.availabilityPublished - open access


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