Show simple item record

Design considerations: From Micro-Opto-Mechanical Pressure Sensor (MOMPS) to Micro-Opto-Mechanical Microphones (MOMM)

dc.contributor.authorHaouari, Rachid
dc.contributor.authorJansen, Roelof
dc.contributor.authorRochus, Veronique
dc.contributor.authorFigeys, Bruno
dc.contributor.authorLagae, Liesbet
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-24T05:25:11Z
dc.date.available2021-10-24T05:25:11Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28455
dc.sourceIIOimport
dc.titleDesign considerations: From Micro-Opto-Mechanical Pressure Sensor (MOMPS) to Micro-Opto-Mechanical Microphones (MOMM)
dc.typeProceedings paper
dc.contributor.imecauthorHaouari, Rachid
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorFigeys, Bruno
dc.contributor.imecauthorLagae, Liesbet
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecFigeys, Bruno::0000-0002-0108-3907
dc.source.peerreviewyes
dc.source.beginpage59
dc.source.endpage63
dc.source.conferenceTech Connect World
dc.source.conferencedate14/05/2017
dc.source.conferencelocationWashington, DC USA
dc.identifier.urlhttps://www.techconnect.org/proceedings/paper.html?volume=TCB2017v4&chapter=3&paper=958
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record