Publication:

SEM based overlay measurement between via patterns and buried M1 patterns using high voltage SEM

Date

2017

Proceedings Paper

https://doi.org/10.1117/12.2257848

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37297.pdf 1019.51 KB

Author(s)

Hasumi, Kazuhisa

;

;

Okagawa, Yutaka

;

;

Leray, Philippe

;

;

;

Jehoul, Christiane

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Acq. date: 2026-09-22