Authors

Hasumi, Kazuhisa; Inoue, Osamu; Okagawa, Yutaka; Shao, Chuanyu; Leray, Philippe; Halder, Sandip; Lorusso, Gian; Jehoul, Christiane

DOI

10.1117/12.2257848

Conference

Metrology, Inspection, and Process Control for Microlithography XXXI

Title

SEM based overlay measurement between via patterns and buried M1 patterns using high voltage SEM

Publication type

Proceedings paper

Embargo date

9999-12-31