Modulating the resistivity of MoS2 through low energy phosphorus plasma implantation

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Authors

Haynes, K.; Murray, R.; Weinrich, Z.; Zhao, X.; Chiappe, Daniele; Sutar, Surajit; Radu, Iuliana; Hatem, C.; Perry, S; Jones, K

ISSN

0003-6951

Issue

26

Journal

Applied Physics Letters

Volume

110

Title

Modulating the resistivity of MoS2 through low energy phosphorus plasma implantation

Publication type

Journal article

Embargo date

9999-12-31

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