dc.contributor.author | Heyne, Markus | |
dc.contributor.author | Goodyear, Andy | |
dc.contributor.author | de Marneffe, Jean-Francois | |
dc.contributor.author | Cooke, Mike | |
dc.contributor.author | Neyts, Erik C. | |
dc.contributor.author | Radu, Iuliana | |
dc.contributor.author | De Gendt, Stefan | |
dc.date.accessioned | 2021-10-24T05:43:20Z | |
dc.date.available | 2021-10-24T05:43:20Z | |
dc.date.issued | 2017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/28505 | |
dc.source | IIOimport | |
dc.title | Atomic layer etching of amorphous silicon with selectivity towards MoS2 for novel MX2 heterostructure device concepts | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
dc.contributor.imecauthor | Radu, Iuliana | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | Radu, Iuliana::0000-0002-7230-7218 | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.source.peerreview | yes | |
dc.source.conference | 10th Plasma Etch and Strip for Microtechnology Workshop - PESM | |
dc.source.conferencedate | 19/10/2017 | |
dc.source.conferencelocation | Leuven Belgium | |
dc.identifier.url | http://pesm-conference.org/index.php/program | |
imec.availability | Published - imec | |