Publication:

New approach to investigate wettability and stability of capping layers on UBMs for 3D stacking applications

Date

2017

Meeting abstract

Simple item page Full metadata Statistics

Author(s)

;

Derakhshandeh, Jaber

;

;

Capuz, Giovanni

;

Van De Peer, Myriam

;

;

Houshmand Sharifi, Shamin

;

De Preter, Inge

;

Rebibis, Kenneth June

;

;

;

De Wolf, Ingrid

Metrics

1947 since deposited on 2021-10-24

Acq. date: 2026-01-09