Authors

Hou, Lin; Derakhshandeh, Jaber; Bex, Pieter; Capuz, Giovanni; Van De Peer, Myriam; Wang, Teng; Houshmand Sharifi, Shamin; De Preter, Inge; Rebibis, Kenneth June; Beyer, Gerald; Beyne, Eric; De Wolf, Ingrid

Conference

Materials for Advanced Metallization Conference - MAM

Title

New approach to investigate wettability and stability of capping layers on UBMs for 3D stacking applications

Publication type

Meeting abstract