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New approach to investigate wettability and stability of capping layers on UBMs for 3D stacking applications

dc.contributor.authorHou, Lin
dc.contributor.authorDerakhshandeh, Jaber
dc.contributor.authorBex, Pieter
dc.contributor.authorCapuz, Giovanni
dc.contributor.authorVan De Peer, Myriam
dc.contributor.authorWang, Teng
dc.contributor.authorHoushmand Sharifi, Shamin
dc.contributor.authorDe Preter, Inge
dc.contributor.authorRebibis, Kenneth June
dc.contributor.authorBeyer, Gerald
dc.contributor.authorBeyne, Eric
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-24T05:52:29Z
dc.date.available2021-10-24T05:52:29Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28528
dc.sourceIIOimport
dc.titleNew approach to investigate wettability and stability of capping layers on UBMs for 3D stacking applications
dc.typeMeeting abstract
dc.contributor.imecauthorHou, Lin
dc.contributor.imecauthorDerakhshandeh, Jaber
dc.contributor.imecauthorBex, Pieter
dc.contributor.imecauthorCapuz, Giovanni
dc.contributor.imecauthorVan De Peer, Myriam
dc.contributor.imecauthorHoushmand Sharifi, Shamin
dc.contributor.imecauthorDe Preter, Inge
dc.contributor.imecauthorRebibis, Kenneth June
dc.contributor.imecauthorBeyer, Gerald
dc.contributor.imecauthorBeyne, Eric
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDerakhshandeh, Jaber::0000-0003-2448-9165
dc.contributor.orcidimecBex, Pieter::0000-0003-0896-2514
dc.contributor.orcidimecCapuz, Giovanni::0000-0002-5263-4836
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewno
dc.source.conferenceMaterials for Advanced Metallization Conference - MAM
dc.source.conferencedate26/03/2017
dc.source.conferencelocationDresden Germany
imec.availabilityPublished - imec


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