dc.contributor.author | Hou, Lin | |
dc.contributor.author | Derakhshandeh, Jaber | |
dc.contributor.author | Bex, Pieter | |
dc.contributor.author | Capuz, Giovanni | |
dc.contributor.author | Van De Peer, Myriam | |
dc.contributor.author | Wang, Teng | |
dc.contributor.author | Houshmand Sharifi, Shamin | |
dc.contributor.author | De Preter, Inge | |
dc.contributor.author | Rebibis, Kenneth June | |
dc.contributor.author | Beyer, Gerald | |
dc.contributor.author | Beyne, Eric | |
dc.contributor.author | De Wolf, Ingrid | |
dc.date.accessioned | 2021-10-24T05:52:29Z | |
dc.date.available | 2021-10-24T05:52:29Z | |
dc.date.issued | 2017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/28528 | |
dc.source | IIOimport | |
dc.title | New approach to investigate wettability and stability of capping layers on UBMs for 3D stacking applications | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Hou, Lin | |
dc.contributor.imecauthor | Derakhshandeh, Jaber | |
dc.contributor.imecauthor | Bex, Pieter | |
dc.contributor.imecauthor | Capuz, Giovanni | |
dc.contributor.imecauthor | Van De Peer, Myriam | |
dc.contributor.imecauthor | Houshmand Sharifi, Shamin | |
dc.contributor.imecauthor | De Preter, Inge | |
dc.contributor.imecauthor | Rebibis, Kenneth June | |
dc.contributor.imecauthor | Beyer, Gerald | |
dc.contributor.imecauthor | Beyne, Eric | |
dc.contributor.imecauthor | De Wolf, Ingrid | |
dc.contributor.orcidimec | Derakhshandeh, Jaber::0000-0003-2448-9165 | |
dc.contributor.orcidimec | Bex, Pieter::0000-0003-0896-2514 | |
dc.contributor.orcidimec | Capuz, Giovanni::0000-0002-5263-4836 | |
dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
dc.contributor.orcidimec | De Wolf, Ingrid::0000-0003-3822-5953 | |
dc.source.peerreview | no | |
dc.source.conference | Materials for Advanced Metallization Conference - MAM | |
dc.source.conferencedate | 26/03/2017 | |
dc.source.conferencelocation | Dresden Germany | |
imec.availability | Published - imec | |