Authors

Hou, Lin; Derakhshandeh, Jaber; De Coster, Jeroen; Wang, Teng; Cherman, Vladimir; Bex, Pieter; Van De Plas, Geert; Beyer, Gerald; Beyne, Eric; De Wolf, Ingrid

Conference

IEEE SOI-3D-Subthreshold Microelectronics Technology Unified Conference - IEEE S3S

Title

A novel in-situ resistance measurement to extract IMC resistivity and kinetic parameter for CoSn 3D stacks

Publication type

Proceedings paper

Embargo date

9999-12-31