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Frequency response and mode shape characterization for acoustic sensor in micro-opto-mechanical technology

dc.contributor.authorHuang, Chih Hsien
dc.contributor.authorGao, Hang
dc.contributor.authorHaouari, Rachid
dc.contributor.authorTroia, Benedetto
dc.contributor.authorMao, Shengping
dc.contributor.authorJansen, Roelof
dc.contributor.authorRochus, Veronique
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-24T05:58:49Z
dc.date.available2021-10-24T05:58:49Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28544
dc.sourceIIOimport
dc.titleFrequency response and mode shape characterization for acoustic sensor in micro-opto-mechanical technology
dc.typeProceedings paper
dc.contributor.imecauthorGao, Hang
dc.contributor.imecauthorHaouari, Rachid
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage4
dc.source.conferenceIEEE International Ultrasonics Symposium - IUS
dc.source.conferencedate6/09/2017
dc.source.conferencelocationWashinton, DC USA
dc.identifier.urlhttp://ieeexplore.ieee.org/document/8092985/
imec.availabilityPublished - open access


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