Publication:

Effect of Al2O3 and SiO2 Abrasives on the CMP of molybdenum using different polishing parameters

Date

2017-10

Proceedings Paper

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Author(s)

Kalantzis, Panagiotis

;

;

De Gendt, Stefan

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1950 since deposited on 2021-10-24

Acq. date: 2026-05-16