Measurement of nonuniform stresses in semiconductors by the micro-Raman method

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Authors
Pinardi, Kuntjoro; Jain, Suresh; Maes, Herman; Van Overstraeten, Roger; Willander, M.; Atkinson, A.
Conference
Thin Films: Stresses and Mechanical Propeties VII
Title
Measurement of nonuniform stresses in semiconductors by the micro-Raman method
Publication type
Proceedings paper
Embargo date
9999-12-31
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