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The improvement of subthreshold slope and trans-conductance of P-type bulk Si field-effect-transistors by solid-source doping
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Authors
Kikuchi, Yoshiaki
;
Chiarella, Thomas
;
De Roest, David
;
Kenis, Karine
;
Ong, Patrick
;
Horiguchi, Naoto
ISSN
0018-9383
Issue
6
Journal
IEEE Transactions on Electron Devices
Volume
64
Title
The improvement of subthreshold slope and trans-conductance of P-type bulk Si field-effect-transistors by solid-source doping
Publication type
Journal article
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