Publication:

EUV single patterning for logic metal layers: achievement and challenge

Date

2017

Proceedings Paper

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Author(s)

Kim, Ryan Ryoung han

;

Gillijns, Werner

;

Drissi, Youssef

;

Trivkovic, Darko

;

;

Lariviere, Stephane

;

De Ruyter, Rudi

;

;

;

Statistics

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Acq. date: 2026-03-17