Publication:
Etch residue formation and growth on patterned porous dielectrics: angle-resolved XPS and Infrared characterization
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1808 since deposited on 2021-10-24
5last month
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Acq. date: 2026-10-12
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Statistics
Views
1808 since deposited on 2021-10-24
5last month
3last week
Acq. date: 2026-10-12
Citations