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Etch residue formation and growth on patterned porous dielectrics: angle-resolved XPS and Infrared characterization
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Authors
Le, Quoc Toan
;
Kesters, Els
;
Holsteyns, Frank
Conference
AVS 64th International Symposium
Title
Etch residue formation and growth on patterned porous dielectrics: angle-resolved XPS and Infrared characterization
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Meeting abstract
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