dc.contributor.author | Le, Quoc Toan | |
dc.contributor.author | Kesters, Els | |
dc.contributor.author | Holsteyns, Frank | |
dc.date.accessioned | 2021-10-24T07:35:16Z | |
dc.date.available | 2021-10-24T07:35:16Z | |
dc.date.issued | 2017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/28771 | |
dc.source | IIOimport | |
dc.title | Etch residue formation and growth on patterned porous dielectrics: angle-resolved XPS and Infrared characterization | |
dc.type | Meeting abstract | |
dc.contributor.imecauthor | Le, Quoc Toan | |
dc.contributor.imecauthor | Kesters, Els | |
dc.contributor.imecauthor | Holsteyns, Frank | |
dc.contributor.orcidimec | Le, Quoc Toan::0000-0002-0206-6279 | |
dc.source.peerreview | yes | |
dc.source.conference | AVS 64th International Symposium | |
dc.source.conferencedate | 29/10/2017 | |
dc.source.conferencelocation | Tampa, FL USA | |
imec.availability | Published - imec | |