Publication:

In-line metrology for characterization and control of extreme wafer thinning of bonded wafers

Date

2017

Proceedings Paper

Simple item page Full metadata Statistics

Files

36262.pdf 577.65 KB

Author(s)

Liebens, Maarten

;

;

;

Vandeweyer, Tom

;

;

;

;

;

Stoerring, Moritz

;

;

Metrics

1961 since deposited on 2021-10-24

Acq. date: 2025-12-12