Publication:

Epitaxial CVD growth of ultra-thin Si passivation layers on strained Ge FIN structures

Date

2017-07
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Author(s)

Loo, Roger  
;
Arimura, Hiroaki  
;
Cott, Daire  
;
Witters, Liesbeth  
;
Pourtois, Geoffrey  
;
Schulze, Andreas
;
Douhard, Bastien  
;
Vanherle, Wendy  
;
Richard, Olivier  
;
Favia, Paola  
;
Eneman, Geert  
;
Mitard, Jerome  
;
Collaert, Nadine  

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1839 since deposited on 2021-10-24
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