Unbiased roughness measurements: subtracting out SEM effects

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Authors
Lorusso, Gian; Rutigliani, Vito; Van Roey, Frieda; Mack, Chris
Conference
43rd International Conference on Micro and Nanoengineering - MNE
Title
Unbiased roughness measurements: subtracting out SEM effects
Publication type
Oral presentation
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