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Unbiased roughness measurements: subtracting out SEM effects

dc.contributor.authorLorusso, Gian
dc.contributor.authorRutigliani, Vito
dc.contributor.authorVan Roey, Frieda
dc.contributor.authorMack, Chris
dc.date.accessioned2021-10-24T08:16:39Z
dc.date.available2021-10-24T08:16:39Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28858
dc.sourceIIOimport
dc.titleUnbiased roughness measurements: subtracting out SEM effects
dc.typeOral presentation
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorVan Roey, Frieda
dc.source.peerreviewno
dc.source.conference43rd International Conference on Micro and Nanoengineering - MNE
dc.source.conferencedate18/09/2017
dc.source.conferencelocationBraga Portugal
dc.identifier.urlhttp://mne2017.org/wp-content/uploads/2017/10/Booklet_MNE_FINAL_WEB.pdf
imec.availabilityPublished - imec
imec.internalnotesPO092


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