Publication:

The impact of sequential-3D integration on semiconductor scaling roadmap

Date

2017

Proceedings Paper

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Author(s)

Mallik, Arindam

;

Vandooren, Anne

;

Witters, Liesbeth

;

;

;

Sherazi, Yasser

;

;

Yakimets, Dmitry

;

Garcia Bardon, Marie

;

Parvais, Bertrand

;

Debacker, Peter

;

;

;

;

;

Ryckaert, Julien

;

Collaert, Nadine

;

Raghavan, Praveen

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1980 since deposited on 2021-10-24

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Acq. date: 2026-07-17