Practical steps towards wafer-scaled III-V vertical FETs fabrication

Thumbnail
Metadata
Show full item record
Authors
Milenin, Alexey; Veloso, Anabela; Collaert, Nadine; Piumi, Daniele
Conference
43rd International Conference on Micro and Nanoengineering - MNE
Title
Practical steps towards wafer-scaled III-V vertical FETs fabrication
Publication type
Meeting abstract
Collections