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Single and double diffusion breaks in 14nm FinFET and beyond

dc.contributor.authorMiyaguchi, Kenichi
dc.contributor.authorBufler, Fabian
dc.contributor.authorChiarella, Thomas
dc.contributor.authorMatagne, Philippe
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorEneman, Geert
dc.contributor.authorParvais, Bertrand
dc.contributor.authorMocuta, Anda
dc.contributor.authorSpessot, Alessio
dc.contributor.authorVerkest, Diederik
dc.date.accessioned2021-10-24T09:21:53Z
dc.date.available2021-10-24T09:21:53Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28989
dc.sourceIIOimport
dc.titleSingle and double diffusion breaks in 14nm FinFET and beyond
dc.typeProceedings paper
dc.contributor.imecauthorMiyaguchi, Kenichi
dc.contributor.imecauthorBufler, Fabian
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorMatagne, Philippe
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorParvais, Bertrand
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.orcidimecMiyaguchi, Kenichi::0000-0002-7073-6457
dc.contributor.orcidimecBufler, Fabian::0000-0002-1558-9378
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecParvais, Bertrand::0000-0003-0769-7069
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.source.peerreviewyes
dc.source.beginpage219
dc.source.endpage220
dc.source.conference49th International Conferece on Solid State Devices and Materials - SSDM
dc.source.conferencedate19/09/2017
dc.source.conferencelocationSendai Japan
imec.availabilityPublished - imec


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