Single and double diffusion breaks in 14nm FinFET and beyond

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Authors
Miyaguchi, Kenichi; Bufler, Fabian; Chiarella, Thomas; Matagne, Philippe; Horiguchi, Naoto; De Keersgieter, An; Eneman, Geert; Parvais, Bertrand; Mocuta, Anda; Spessot, Alessio; Verkest, Diederik
Conference
49th International Conferece on Solid State Devices and Materials - SSDM
Title
Single and double diffusion breaks in 14nm FinFET and beyond
Publication type
Proceedings paper
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