Publication:

Single and double diffusion breaks in 14nm FinFET and beyond

Date

2017
Proceedings Paper
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dc.contributor.authorMiyaguchi, Kenichi
dc.contributor.authorBufler, Fabian
dc.contributor.authorChiarella, Thomas
dc.contributor.authorMatagne, Philippe
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorDe Keersgieter, An
dc.contributor.authorEneman, Geert
dc.contributor.authorParvais, Bertrand
dc.contributor.authorMocuta, Anda
dc.contributor.authorSpessot, Alessio
dc.contributor.authorVerkest, Diederik
dc.contributor.imecauthorMiyaguchi, Kenichi
dc.contributor.imecauthorBufler, Fabian
dc.contributor.imecauthorChiarella, Thomas
dc.contributor.imecauthorMatagne, Philippe
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorDe Keersgieter, An
dc.contributor.imecauthorEneman, Geert
dc.contributor.imecauthorParvais, Bertrand
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.orcidimecMiyaguchi, Kenichi::0000-0002-7073-6457
dc.contributor.orcidimecBufler, Fabian::0000-0002-1558-9378
dc.contributor.orcidimecChiarella, Thomas::0000-0002-6155-9030
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecDe Keersgieter, An::0000-0002-5527-8582
dc.contributor.orcidimecEneman, Geert::0000-0002-5849-3384
dc.contributor.orcidimecParvais, Bertrand::0000-0003-0769-7069
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.date.accessioned2021-10-24T09:21:53Z
dc.date.available2021-10-24T09:21:53Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28989
dc.source.beginpage219
dc.source.conference49th International Conferece on Solid State Devices and Materials - SSDM
dc.source.conferencedate19/09/2017
dc.source.conferencelocationSendai Japan
dc.source.endpage220
dc.title

Single and double diffusion breaks in 14nm FinFET and beyond

dc.typeProceedings paper
dspace.entity.typePublication
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