Publication:

Single and double diffusion breaks in 14nm FinFET and beyond

Date

2017

Proceedings Paper

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Author(s)

Miyaguchi, Kenichi

;

;

Chiarella, Thomas

;

Matagne, Philippe

;

Horiguchi, Naoto

;

De Keersgieter, An

;

;

Parvais, Bertrand

;

;

Spessot, Alessio

;

Verkest, Diederik

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2575 since deposited on 2021-10-24

Acq. date: 2026-06-25