Publication:

Dopant segregation and diffusion in CVD epitaxial grown germanium

Date

2017-11

Proceedings Paper

Simple item page Full metadata Statistics

Author(s)

Murota, Junichi

;

Yamamoto, Yuchi

;

;

Baerwolf, Florian

;

;

;

;

Douhard, Bastien

;

;

Statistics

1930 since deposited on 2021-10-24

1last month

Acq. date: 2026-05-20