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Dopant segregation and diffusion in CVD epitaxial grown germanium

dc.contributor.authorMurota, Junichi
dc.contributor.authorYamamoto, Yuchi
dc.contributor.authorCostina, Ioan
dc.contributor.authorBaerwolf, Florian
dc.contributor.authorTillack, Bernd
dc.contributor.authorLe Thanh, Vinh
dc.contributor.authorLoo, Roger
dc.contributor.authorDouhard, Bastien
dc.contributor.authorAyyad, Mustafa
dc.contributor.authorCaymax, Matty
dc.date.accessioned2021-10-24T09:49:10Z
dc.date.available2021-10-24T09:49:10Z
dc.date.issued2017-11
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29042
dc.sourceIIOimport
dc.titleDopant segregation and diffusion in CVD epitaxial grown germanium
dc.typeProceedings paper
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorAyyad, Mustafa
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.source.peerreviewyes
dc.source.beginpage37
dc.source.endpage41
dc.source.conferenceProceedings of the 6th International Workshop on Nanotechnology and Application - IWNA
dc.source.conferencedate8/11/2017
dc.source.conferencelocationPhan Thiet Vietnam
imec.availabilityPublished - imec


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