Authors

Murota, Junichi; Yamamoto, Yuchi; Costina, Ioan; Tillack, Bernd; Le Thanh, Vin; Loo, Roger; Caymax, Matty

Conference

ULSIC vs TFT: 6th Int Conference on Semiconductor Technology for Ultra Large Scale Integrated Circuits and Thin Film Transistors

Title

Atomically controlled processing for dopant segregation in CVD Si and Ge epitaxial growth

Publication type

Proceedings paper

Embargo date

9999-12-31