Comparison of InGaAs and InAIAs sacrificial layers for release of InP-based devices

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37758.pdf 2.04 MB

Author(s)

O'Callaghan, J.

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Roelkens, Gunther

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Journal

Optical Materials Express

Metrics

1925 since deposited on 2021-10-24

Acq. date: 2025-10-24