Comparison of InGaAs and InAIAs sacrificial layers for release of InP-based devices

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Authors

O'Callaghan, J.; Loi, R.; Mura, E.E.; Roycroft, B.; Trindade, A.J.; Thomas, K.; Gocalinska, A.; Pelucchi, E.; Zhang, Jing; Roelkens, Gunther; Bower, C.A.; Corbett, B.

ISSN

2159-3930

Issue

12

Journal

Optical Materials Express

Volume

7

Title

Comparison of InGaAs and InAIAs sacrificial layers for release of InP-based devices

Publication type

Journal article

Embargo date

9999-12-31

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