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3D measurement of 3D NAND memory hole with CD-SEM and tilted FIB

dc.contributor.authorOhashi, Takeyoshi
dc.contributor.authorYamaguchi, Atsuko
dc.contributor.authorHasumi, Kazuhisa
dc.contributor.authorIkota, Masami
dc.contributor.authorTan, Chi Lim
dc.contributor.authorRaymaekers, Tom
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorFurnemont, Arnaud
dc.contributor.authorLorusso, Gian
dc.date.accessioned2021-10-24T10:21:12Z
dc.date.available2021-10-24T10:21:12Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29103
dc.sourceIIOimport
dc.title3D measurement of 3D NAND memory hole with CD-SEM and tilted FIB
dc.typeProceedings paper
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorFurnemont, Arnaud
dc.contributor.imecauthorLorusso, Gian
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecFurnemont, Arnaud::0000-0002-6378-1030
dc.source.peerreviewno
dc.source.beginpageOC073
dc.source.conference43rd International Conference on Micro and Nanoengineering - MNE
dc.source.conferencedate18/09/2017
dc.source.conferencelocationBraga Portugal
dc.identifier.urlhttp://mne2017.org/wp-content/uploads/2017/10/Booklet_MNE_FINAL_WEB.pdf
imec.availabilityPublished - imec


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