3D measurement of 3D NAND memory hole with CD-SEM and tilted FIB

Thumbnail
Metadata
Show full item record
Authors
Ohashi, Takeyoshi; Yamaguchi, Atsuko; Hasumi, Kazuhisa; Ikota, Masami; Tan, Chi Lim; Raymaekers, Tom; Van den Bosch, Geert; Furnemont, Arnaud; Lorusso, Gian
Conference
43rd International Conference on Micro and Nanoengineering - MNE
Title
3D measurement of 3D NAND memory hole with CD-SEM and tilted FIB
Publication type
Proceedings paper
Collections