Publication:

3D measurement of 3D NAND memory hole with CD-SEM and tilted FIB

Date

2017

Proceedings Paper

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Author(s)

Ohashi, Takeyoshi

;

Yamaguchi, Atsuko

;

Hasumi, Kazuhisa

;

;

;

Raymaekers, Tom

;

Van den Bosch, Geert

;

Furnemont, Arnaud

;

Metrics

2213 since deposited on 2021-10-24

Acq. date: 2026-01-08