Publication:
3D measurement of 3D NAND memory hole with CD-SEM and tilted FIB
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2213 since deposited on 2021-10-24
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Acq. date: 2025-12-09
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Views
2213 since deposited on 2021-10-24
2last month
2last week
Acq. date: 2025-12-09
Citations