Publication:
3D measurement of 3D NAND memory hole with CD-SEM and tilted FIB
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2219 since deposited on 2021-10-24
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Acq. date: 2026-04-27
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Statistics
Views
2219 since deposited on 2021-10-24
3last month
1last week
Acq. date: 2026-04-27
Citations