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3D measurement of 3D NAND memory hole with CD-SEM and tilted FIB

Date

2017
Proceedings Paper
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dc.contributor.authorOhashi, Takeyoshi
dc.contributor.authorYamaguchi, Atsuko
dc.contributor.authorHasumi, Kazuhisa
dc.contributor.authorIkota, Masami
dc.contributor.authorTan, Chi Lim
dc.contributor.authorRaymaekers, Tom
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorFurnemont, Arnaud
dc.contributor.authorLorusso, Gian
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorFurnemont, Arnaud
dc.contributor.imecauthorLorusso, Gian
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecFurnemont, Arnaud::0000-0002-6378-1030
dc.date.accessioned2021-10-24T10:21:12Z
dc.date.available2021-10-24T10:21:12Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29103
dc.identifier.urlhttp://mne2017.org/wp-content/uploads/2017/10/Booklet_MNE_FINAL_WEB.pdf
dc.source.beginpageOC073
dc.source.conference43rd International Conference on Micro and Nanoengineering - MNE
dc.source.conferencedate18/09/2017
dc.source.conferencelocationBraga Portugal
dc.title

3D measurement of 3D NAND memory hole with CD-SEM and tilted FIB

dc.typeProceedings paper
dspace.entity.typePublication
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