Authors
Ohashi, Takeyoshi;
Yamaguchi, Atsuko;
Hasumi, Kazuhisa;
Inoue, Osamu;
Ikota, Masami;
Lorusso, Gian;
Donadio, Gabriele Luca;
Yasin, Farrukh;
Rao, Siddharth;
Kar, Gouri Sankar
Conference
Metrology, Inspection, and Process Control for Microlithography XXXI
Title
Variability study with CD-SEM metrology for STT-MRAM: correlation analysis between physical dimensions and electrical property of the memory element
Publication type
Proceedings paper
Embargo date
9999-12-31
