Publication:

Advances in thin wafer debonding and ultra thin 28nm FinFET substrate transfer

Date

2017

Meeting abstract

Simple item page Full metadata Statistics

Files

34916.pdf 1.48 MB

Author(s)

Phommahaxay, Alain

;

Guerrero, Alice

;

;

Potoms, Goedele

;

Verbinnen, Greet

;

;

;

;

;

;

Statistics

2013 since deposited on 2021-10-24

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Acq. date: 2026-08-08