Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Presentations
Gas-phase surface proessing prior to 3.2nm gate oxidation
Publication:
Gas-phase surface proessing prior to 3.2nm gate oxidation
Copy permalink
Date
1998
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ruzyllo, Jerzy
;
Röhr, Erika
;
Baeyens, Martien
;
Bearda, Twan
;
Mertens, Paul
;
Heyns, Marc
Journal
Abstract
Description
Metrics
Views
1984
since deposited on 2021-10-01
Acq. date: 2025-12-10
Citations
Metrics
Views
1984
since deposited on 2021-10-01
Acq. date: 2025-12-10
Citations