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Treatments for reliability improvement in thick oxides diffusion and gate replacement (D&GR) I/O transistors
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Treatments for reliability improvement in thick oxides diffusion and gate replacement (D&GR) I/O transistors
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Date
2017
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ritzenthaler, Romain
;
Cho, Moon Ju
;
Schram, Tom
;
Spessot, Alessio
;
Simoen, Eddy
;
O'Sullivan, Barry
;
Dentoni Litta, Eugenio
;
Horiguchi, Naoto
;
Thean, Aaron
Journal
International Journal of Materials Engineering Innovation
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1881
since deposited on 2021-10-24
Acq. date: 2026-01-09
Citations
Metrics
Views
1881
since deposited on 2021-10-24
Acq. date: 2026-01-09
Citations