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Double MZI micro-opto-mechanical pressure sensors for increased sensitivity and pressure range

dc.contributor.authorRochus, Veronique
dc.contributor.authorJansen, Roelof
dc.contributor.authorFigeys, Bruno
dc.contributor.authorVerhaegen, Fabian
dc.contributor.authorRosseel, Robrect
dc.contributor.authorMerken, Patrick
dc.contributor.authorLenci, Silvia
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-24T12:15:40Z
dc.date.available2021-10-24T12:15:40Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29307
dc.sourceIIOimport
dc.titleDouble MZI micro-opto-mechanical pressure sensors for increased sensitivity and pressure range
dc.typeProceedings paper
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorFigeys, Bruno
dc.contributor.imecauthorMerken, Patrick
dc.contributor.imecauthorLenci, Silvia
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecFigeys, Bruno::0000-0002-0108-3907
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage954
dc.source.endpage957
dc.source.conference19th International Conference on Transducers, Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS
dc.source.conferencedate18/06/2017
dc.source.conferencelocationKaohsiung Taiwan
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7994208/
imec.availabilityPublished - open access


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