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Modelling and design of micro-opto-mechanical pressure sensors in the presence of residual stresses

dc.contributor.authorRochus, Veronique
dc.contributor.authorJansen, Roelof
dc.contributor.authorHaouari, Rachid
dc.contributor.authorFigeys, Bruno
dc.contributor.authorMukund, Vignesh
dc.contributor.authorVerhaegen, Fabian
dc.contributor.authorGoyvaerts, Jeroen
dc.contributor.authorNeutens, Pieter
dc.contributor.authorO'Callaghan, John
dc.contributor.authorStassen, Andim
dc.contributor.authorLenci, Silvia
dc.contributor.authorRottenberg, Xavier
dc.date.accessioned2021-10-24T12:16:22Z
dc.date.available2021-10-24T12:16:22Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29308
dc.sourceIIOimport
dc.titleModelling and design of micro-opto-mechanical pressure sensors in the presence of residual stresses
dc.typeProceedings paper
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorJansen, Roelof
dc.contributor.imecauthorHaouari, Rachid
dc.contributor.imecauthorFigeys, Bruno
dc.contributor.imecauthorGoyvaerts, Jeroen
dc.contributor.imecauthorNeutens, Pieter
dc.contributor.imecauthorO'Callaghan, John
dc.contributor.imecauthorStassen, Andim
dc.contributor.imecauthorLenci, Silvia
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.orcidimecJansen, Roelof::0000-0001-6685-4699
dc.contributor.orcidimecFigeys, Bruno::0000-0002-0108-3907
dc.contributor.orcidimecStassen, Andim::0000-0001-8819-9592
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1
dc.source.endpage5
dc.source.conference18th Int. Conf. Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and ... - IEEE EuroSime
dc.source.conferencedate3/04/2017
dc.source.conferencelocationDresden Germany
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7926285/
imec.availabilityPublished - open access


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