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Use of 3D Xray microscopy for BEOL and advanced packaging failure analysis
Publication:
Use of 3D Xray microscopy for BEOL and advanced packaging failure analysis
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Date
2017-11
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Schmidt, Christian
;
Kelly, Stephen T.
;
De Wolf, Ingrid
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Abstract
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Views
1858
since deposited on 2021-10-24
7
last month
3
last week
Acq. date: 2025-12-18
Citations